u500 interface generic u500 "" "" 1 c:\U500\mmi\U500c.jwp c:\U500\mmi\Litho.prm "" ""
lithox device motor u500_motor "" "" 0 0 -1e30 1e30 0 -1 -1 0.0001 0 mm u500 1 X 20
lithoy device motor u500_motor "" "" 0 0 -1e30 1e30 0 -1 -1 0.0001 0 mm u500 1 Y 20
lithoz device motor u500_motor "" "" 0 0 -1e30 1e30 0 -1 -1 0.0001 0 deg u500 1 Z -1